CM-100C

(Click on the picture)

  • ◆    Flow cover 2sccm-3000sccm for Noncorrosive gas(N2 Equivalent)

  • ◆    Unusual desig of Sensor,extrem accuracy and performance

  • ◆    Easy Integration for Standard connectors and dimensions

  • ◆    RS-485 digital control

  • Specification
  • CM-100C
  • Full Scale Range (N2 Eqv)
  • Single 2-3000sccm
  • Control Valve Type
  • Normal Close or Normal Open (NC or NO)
  • Fitting
  • 1/4"VCR or 1/4"Swagelok or 1/8"Swagelok
  • Seals
  • Viton
  • Response Time
  • ≤1Sec to within ±2% of set point
  • Accuracy
  • ≤1% of full scale
  • Linearity
  • ≤ ±0.5% of full scale
  • Repeatability
  • ≤ ±0.2% of full scale
  • Differential Pressure
  • 7 - 40psi
  • Leak lntegrity
  • Max:1x10-7Pa.m3/sec (He)
  • Control Range
  • 2-100% of full scale
  • Max Operating Pressure
  • 50psi
  • Proof Pressure
  • Max 150psi
  • Communication Type
  • RS485
  • Input Power
  • +15VDC ±2% at 50mA
    -15VDC ±2% at 150mA
  • Command Signal
  • Digital Command 0-100%
  • Output Signal
  • Digital Output 0-100%
  • Power Consumption
  • 3.1W
  • Temperature Range
  • 5-45 Deg C
  • Materials
  • Aluminum,316LSS,PTFE
  • Weight
  • 0.45kg