AN610

(Click on the picture)

  • ◆    Flow cover 2sccm to 50slm (N2 Equivalent) and high accuracy

  • ◆    High Purity and metal seal design, suitable for all gases

  • ◆    Fast response time, <1 sec to within ±2% of set point

  • ◆    Standare connectors and dimension, convenient replacement

  • Specification
  • MC-AN610
  • MC-AN611
  • Full Scale Range (N2 Eqv)
  • Single 2-5000sccm
  • Single 5-50slm
  • Control Valve Type
  • Normal Close or Normal Open (NC or NO)
  • Fitting
  • 1/4"VCR or 1/4"Swagelok
  • Seals
  • Metal
  • Response Time
  • ≤1Sec to within ±2% of set point
  • Accuracy
  • ≤1% of full scale
  • Linearity
  • ≤ ±0.5% of full scale
  • Repeatability
  • ≤ ±0.2% of full scale
  • Differential Pressure
  • 7 - 40psi
  • Leak lntegrity
  • Max:1x10-11Pa.m3/sec (He)
  • Control Range
  • 2-100% of full scale
  • Max Operating Pressure
  • 50psi
  • Proof Pressure
  • Max 150psi
  • Communication Type
  • Analog 0-5V / 4-20mA
  • Input Power
  • +15VDC ±2% at 50mA
    -15VDC ±2% at 150mA
  • Command Signal
  • 0-5 VDC / 4-20 mA
  • Output Signal
  • 0-5 VDC / 4-20 mA
  • Power Consumption
  • 3.1W
  • Temperature Range
  • 5-45 Deg C
  • Materials
  • 316LSS,316SS,PTFE,5RA,TC
  • Weight
  • 1.0kg
  • 1.2kg