DG910

(Click on the picture)

  • ◆    Flow cover 2sccm to 50slm (N2 Equivalent) and high accuracy

  • ◆    High Purity and metal seal design, cover extensive markets and processes

  • ◆    Compatible RS485 and 0-5V mode with metal seal

  • ◆    Substantial cost savings with muti gas & muti range funtion

  • Specification
  • MC-DG910
  • MC-DG911
  • Full Scale Range (N2 Eqv)
  • Single 2-5000sccm
  • Single 5-50slm
  • Control Valve Type
  • Normal Close or Normal Open (NC or NO)
  • Fitting
  • 1/4"VCR or 1/4"Swagelok Compatible
    IGS bottom/surface mount(c-seal or w-seal)
  • Seals
  • Metal
  • Response Time
  • ≤1Sec (above 10% of full scale)
  • Accuracy
  • 25%-100% of full scale:≤±1%S.P
    2%-25% of full scale: ≤ ±0.25%F.S
  • Linearity
  • ≤ ±0.5% of full scale
  • Repeatability
  • ≤ ±0.2% of full scale
  • Differential Pressure
  • 7 - 40psi
  • Leak lntegrity
  • Max:1x10-11Pa.m3/sec (He)
  • Control Range
  • 2-100% of full scale
  • Max Operating Pressure
  • 70psi
  • Proof Pressure
  • Max 140psi
  • Communication Type
  • Analog 0-5V / RS485
  • Input Power
  • +15VDC ±2% at 100mA
    -15VDC ±2% at 200mA
  • Command Signal
  • 0-5 VDC(input impedance>1MΩ)/Digital 0-100%
  • Output Signal
  • 0-5 VDC(input impedance>2KΩ)/Digital 0-100%
  • Surface Finish
  • Electropolished and ultra-cleaned to ≤ 5Ra
  • Temperature Range
  • 5-45 Deg C
  • Materials
  • 316LSS,316SS,PTFE,5RA,TC
  • Weight
  • 1.0kg
  • 1.2kg